S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded High-Speed SECS Message Services (HSMS)

High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another

moisture ingress from non-sealed edge)

Parameters such as edge length and diagonal of a wafer appear to be obvious

This Standard applies to different device configurations ranging from single integrated circuits to multi-chip/3D structures

S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded High-Speed SECS Message Services (HSMS)2010122120112www. semiviews. orgwww. semi. org199820093 : (transferor)(transferee) (ESH) Referenced SEMI Standards SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life