M07600 - SEMI M76 - 開発用直径450 mmシリコン単結晶鏡面ウェーハの仕様 Revision:SEMI M76-0710 - Inactive SEMI S2-0724 (technical revision)

SEMI S2-0724 (technical revision)

Application of this Test Method is expected to yield comparable data among filters or gas systems

It also provides for standardized communication with lithography

此份安全基準為許多常見的製程液體加熱系統（PLHS）構造提供一個安全功能要求規定表。同時也提供這些安全功能的設計及成效標準。製程液體加熱系統（PLHS）符合規定的安全功能清冊和設計及成效標準，意味著可使加熱系統之風險不超過「低」風險等級（定義於SEMI S10和SEMI S14），以符合這份安全基準的要求。

M07600 - SEMI M76 - 開発用直径450 mmシリコン単結晶鏡面ウェーハの仕様 Revision:SEMI M76-0710 - Inactive SEMI S2-0724 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Silicon Wafer Committee2010430global Audits and Reviews Subcommittee20106www. semi. org 450 mmIC450 mm 450 mm 450 mmAMHS450 mm450 mmSEMI M74 SI (System International Referenced SEMI Standards SEMI E45 Test Method for the