C09900 - SEMI C99 - Test Method for Determining Conductivity of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals StdPbc-0309 Each tool should be supplied

Each tool should be supplied in a ‘facility ready’ state

This Safety Guideline is intended to be used to ensure that decontamination prior to transportation occurs to the greatest extent possible

メンテナンスあるいはサービスに必要なあらゆる装置が含まれる。

1-0310 (technical revision)

C09900 - SEMI C99 - Test Method for Determining Conductivity of Chemical Mechanical Planarization (CMP) Slurries and Related Chemicals StdPbc-0309 Each tool should be suppliedThis Test Method provides a standardized test method for measuring and reporting the conductivity of slurries and post chemical mechanical polish (CMP) chemicals. This Test Method defines the number of significant digits to which conductivity will be reported, given the limitations of current metrology and methodology capabilities, and define a standardized temperature for the measurement. This Test Method also supplies a method of calibrating