E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded polarizing film

polarizing film

This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle

Appropriate information is summarized in § 5

SEMI MF110-1107 (technical revision)

E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded polarizing filmNOTICE: SEMI E19. 4 and SEMI E19. 5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately. This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www. semiviews. org and www. semi. org in April 2017; originally published in