F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive • Flow Coefficient

• Flow Coefficient

This Document provides a common basis for communication between manufacturers and users regarding testing and describing MFC pressure effects

SEMI F27-0997 (first published)

form a complete interoperability specification for the EPD

F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive • Flow CoefficientThis specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the