M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive SEMI F86 — Specification for

SEMI F86 — Specification for Dimension of Two Port Components (Except MFC/MFM) for 1

and location for printed

SEMI C30 — Specifications and Guidelines for Hydrogen Peroxide

Surface Roughness Limits

M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive SEMI F86 — Specification forThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated