D00900 - SEMI D9 - Terminology for FPD Substrates StdDcs-Replaced 1-1101 (technical revision)

1-1101 (technical revision)

This standard falls under the general specification

SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)

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D00900 - SEMI D9 - Terminology for FPD Substrates StdDcs-Replaced 1-1101 (technical revision)NOTICE: This Document was reapproved with minor editorial changes. This Document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates. These terms and definitions are applicable to both front and back substrates used in FPD fabrication. Referenced SEMI Standards (purchase separately) SEMI D3