E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control 本書内で参照されている浸出テストとこれに関連する要求条件は，静的な状態での数値を提供する。

本書内で参照されている浸出テストとこれに関連する要求条件は，静的な状態での数値を提供する。

SEMI C54 — Specification and Guide for Oxygen

This Standard was technically approved by the Flat Panel Display – Color Global Technical Committee

where a 450 FOUP and 450 MAC can be loaded and unloaded

E14300 - SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle StdVol-Silicon Materials & Process Control 本書内で参照されている浸出テストとこれに関連する要求条件は，静的な状態での数値を提供する。The purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113. This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and