E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework This Standard was technically approved

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee

The purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards

SEMI G93-0412 (first published)

SEMI MF1530-0707 (technical revision)

E08400 - SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 StdTpc-CIM Framework This Standard was technically approvedglobal Physical Interfaces & Carriers Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM19996200711 AMHS: automated material handling systemsFOUPAMHSPI O SEMI E23I O Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 Wafers SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E23 Specification for Cassette Transfer Parallel I O Interface SEMI E30 Generic