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F05500 - SEMI F55 - マスフローコントローラの耐腐食性を求めるための試験方法 Revision:SEMI F55-0600 (Reapproved 0412) - Superseded SEMI F60 — Test Method

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SEMI F60 — Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

• Epitaxial wafers with buried layer (refer to SEMI M61)

SEMI E30-0307 (technical revision)

SEMI S14-0704 (technical revision)

F05500 - SEMI F55 - マスフローコントローラの耐腐食性を求めるための試験方法 Revision:SEMI F55-0600 (Reapproved 0412) - Superseded SEMI F60 — Test MethodNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee20111224global Audits and Reviews Subcommittee20124www. semiviews. org www. semi. org2000620073 : MFCMFC HClHClMFCMFCMFC Referenced SEMI Standards SEMI F1 Specification for Leak Integrity of High Purity

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